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{"type":"article", "name":"y.w.lai201010", "author":"Y.W. Lai and N. Koukourakis and N.C. Gerhardt and M. Hofmann and R. Meyer and S. Hamann and M. Ehmann and K. Hackl and E. Darakis and A. Ludwig", "title":"Integrity of microhotplates during hightemperature operation monitored by digital holographic microscopy", "journal":"Journal of Microelectromechanical Systems", "volume":"19", "OPTnumber":"5", "OPTmonth":"10", "year":"2010", "OPTpages":"1175-1179", "OPTnote":"", "OPTkey":"Digital holography, microelectromechanical systems integrity, micro-hotplates, surface topography", "DOI":"10.1109/JMEMS.2010.2067442"}